D03200 - SEMI D32 - Specification for Improved Information Management for Glass FPD Substrates Through Orientation Corner Unification Revision:SEMI D32-0303 - Superseded the Sensor/Actuator Network CDM

the Sensor/Actuator Network CDM

It is meant to provide consistency in terminology among gas suppliers and to provide a general guideline for users of these gases

The specific format and protocol implementation of these interface specifications

Process technology used in the manufacture of semiconductors and electronic devices continues to achieve increases in active feature density and device complexity

SEMI C34-0113 (technical revision)

D03200 - SEMI D32 - Specification for Improved Information Management for Glass FPD Substrates Through Orientation Corner Unification Revision:SEMI D32-0303 - Superseded the Sensor/Actuator Network CDMThis Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www. semi. org in July 2009; originally published March 2003. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety