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F05800 - SEMI F58 - 大気圧イオン化質量分析計(APIMS)による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 Revision:SEMI F58-0708 - Inactive a fitting body temperature range

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Description

a fitting body temperature range of 23°C to 125°C (73°F to 257°F) should be maintained

本文書はマップデータアイテムスタンダードSEMI G81と,現在開発中であるマップデータフォーマットドキュメントの拡張である。本文書は一般的仕様を再定義しているものではない。

3D chromaticity

SEMI M65-0306E (editorial revision)

1-0703 (first published)

F05800 - SEMI F58 - 大気圧イオン化質量分析計(APIMS)による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 Revision:SEMI F58-0708 - Inactive a fitting body temperature rangeNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Gases Committee2008513global Audits and Reviews Subcommittee20086www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive

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