G09000 - SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes Revision:SEMI G90-0811 (Reapproved 0318) - Superseded Semiconductor processing equipment includes equipment

Semiconductor processing equipment includes equipment intended for wafer manufacturing

This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection

2-0698 (Reapproved 0615)

本文書の目的は，ユースポイント（POU）ガスフィルタを使用して達成可能なパーティクル濾過効率を資格付けるための，包括的な標準試験シーケンスを定義することである。

1  This Standard defines the destructive pull strength test method and its criterion for evaluating pull strength of wire bonds connecting two points

G09000 - SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes Revision:SEMI G90-0811 (Reapproved 0318) - Superseded Semiconductor processing equipment includes equipmentThe purpose of this Standard is to standardize the specifications for 300 mm wafer coin stack type shipping container used for test and packaging processes for wafers. This Specification defines the dimensions of container (refer to 5. 1. 1) and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers