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0) define the CR and CM
This Test Method is intended to demonstrate the system performance of EFFU
SEMI F98-0618 (complete rewrite)
Although cleaning and packaging procedures are not a part of this Practice
53 mm (3/8 in
MS01400 - SEMI MS14 - Guide for Critical Parameters of Gas Sensors StdPbc-0707 0) define the CR andAs with many emerging technologies, gas sensor makers today do not conform to specific or well understood standards, whether it is with regards to parameter definitions, testing methods, reliability requirements, packaging, pin configurations, communication interfaces, etc., to name a few. Given the state of technology evolution and the markets in this space, the timing is right for a set of defined standards regarding gas sensors. We envisage that
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